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Fundamentals of Semiconductor Manufacturing and Process Control

Fundamentals of Semiconductor Manufacturing and Process Control

Gary S. May, Costas J. Spanos

464 pages, parution le 29/06/2006

Résumé

A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.

Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields.

The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis.

Critical coverage includes the following:

  • Combines process control and semiconductor manufacturing
  • Unique treatment of system and software technology and management of overall manufacturing systems
  • Chapters include case studies, sample problems, and suggested exercises
  • Instructor support includes electronic copies of the figures and an instructor's manual

Graduate-level students and industrial practitioners will benefit from the detailed examination of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment.

L'auteur - Gary S. May

Gary S. May Ph.D. is Executive Assistant to the President and Motorola Foundation Professor of Microelectronics in the School of Electrical and Computer Engineering at the Georgia Institute of Technology. Dr. May was a national Science Foundation national Young Investigator, Georgia Tech's Outstanding Young Alumnus, received Georgia Tech's Outstanding Service Award, and was named a Giant of Science by the Quality Education for Minorities network in 2001. He was a member of the NSF Engineering Advisory Committee, served on and chaired the NSF Committee for Equal Opportunity in Science and Engineering, and was Editor-in-Chief for IEEE Transactions of Semiconductor Manufacturing from 1997 to 2001. Dr. May currently serves as chair of the National Advisory Board for the National Society of Black Engineers.

Sommaire

  • Introduction to semiconductor manufacturing
  • Technology overview
  • Process monitoring
  • Statistical fundamentals
  • Yield modeling
  • Statistical process control
  • Statistical experimental design
  • Process modeling
  • Advanced process control
  • Process and equipment diagnosis
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Caractéristiques techniques

  PAPIER
Éditeur(s) Wiley
Auteur(s) Gary S. May, Costas J. Spanos
Parution 29/06/2006
Nb. de pages 464
Format 16 x 24
Couverture Relié
Poids 778g
Intérieur Noir et Blanc
EAN13 9780471784067
ISBN13 978-0-471-78406-7

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