Fundamentals of Microfabrication

The Science of Miniaturization

Marc J. Madou

724 pages, parution le 30/04/2002 (2^eme édition)

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Résumé

Offers the most comprehensive introduction to the science of miniaturization
Includes well-chosen examples and hundreds of illustrations, many in full color
Provides extensive lists of references, Web links, and suggestions for further reading
Reviews both top-down and bottom-up manufacturing methods
Bridges the gap between "wet" and "dry" microengineering
Details an abundance of industrial and medical MEMS applications, from the historical to the state-of-the-art

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

Revised chapters that reflect the many recent advances in the field
Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
Many more links to the Web
Problem sets in each chapter

Contents

Lithography
Pattern transfer with dry etching techniques
Pattern transfer with additive techniques
Wet bulk micromachining
Surface micromachining
LIGA and micromolding
A comparison of miniaturization techniques : top-down and bottom-up manufacturing
Modeling, brains, packaging, sample preparation, and substrate choise
Scaling, actuators, and power in miniaturized systems
Miniaturization applications
Appendix A : Techniques for MEMS
Appendix B : Living Book
Appendix C : Si and SiO2 etch rates in KOH
Appendix D : Genetics
Appendix E : Suggested further reading
Appendix F : MEMS Companies
Appendix G : Glossary

Caractéristiques techniques

	PAPIER
Éditeur(s)	CRC Press (Taylor and Francis Group)
Auteur(s)	Marc J. Madou
Parution	30/04/2002
Édition	2^eme édition
Nb. de pages	724
Format	22 x 28,5
Couverture	Relié
Poids	1980g
Intérieur	Noir et Blanc
EAN13	9780849308260
ISBN13	978-0-8493-0826-0