Mems and Nems

Systems, Devices, and Structures

Sergey Edward Lyshevski

462 pages, parution le 07/03/2002

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Résumé

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors.MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems.

Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization.The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense, are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Contents

Overview and Introduction
New Trends in Engineering and Science: Nano- and Microscale System
Fundamentals of MEMS Fabrication
Devising and Synthesis of NEMS and MEMS
Modeling of Nano- and Micro-Scale Electromechanical Systems, Devices, and Structures
Nanosystems, Quantum Mechanics, and Mathematical Models
Control of Micro Systems and Devices
Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided-Design of MEMS

Index

L'auteur - Sergey Edward Lyshevski

Sergey Edward Lyshevski: Rochester Institute of Technology, New York, USA

Caractéristiques techniques

	PAPIER
Éditeur(s)	CRC Press (Taylor and Francis Group)
Auteur(s)	Sergey Edward Lyshevski
Parution	07/03/2002
Nb. de pages	462
Format	16 x 24
Couverture	Relié
Poids	847g
Intérieur	Noir et Blanc
EAN13	9780849312625
ISBN13	978-0-8493-1262-5