
Résumé
For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power.
This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others.
This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge.
Contents
- Introduction to Radio Frequency Power
- Signal Sources
- RF Power Amplifier Fundamentals
- High Power RF Amplifiers
- Impedance Matching
- Introduction to Transmission Lines
- Smith Charts and Their Applications
- Power Measurement and Control
- RF Power Systems Specifications, Troubleshooting and Maintenance
- Industrial Applications of RF Power
- Appendix
- Index
Caractéristiques techniques
PAPIER | |
Éditeur(s) | Prentice Hall |
Auteur(s) | Louis E. Frenzel, Jr. |
Parution | 18/08/2003 |
Nb. de pages | 288 |
Format | 19,5 x 24,3 |
Couverture | Relié |
Poids | 655g |
Intérieur | Noir et Blanc |
EAN13 | 9780130965776 |
ISBN13 | 978-0-13-096577-6 |
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