User's Guide to Vacuum Technology

John F. O'Hanlon

516 pages, parution le 31/07/2003 (3^eme édition)

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Indisponible

Résumé

The leading text in the field–fully updated to reflect changes in vacuum technology In the decade and a half since the publication of the Second Edition of A User's Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today's vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User's Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

The Third Edition features significant additions, including:

Updated coverage of all topics
A discussion of SI units and their conversion
Expanded coverage of gauges, pumps, materials, components, and systems
A discussion of ultraclean vacuum systems–now used routinely in high-volume production of semiconductor chips and related process-sensitive devices
A review of rough pumping and crossover, including methods for prevention of aerosol formation

As with previous editions, the Third Edition is an important resource for both students and professionals in microelectronics, optics, thin-film coating, and other industries dependent on leading-edge applications of vacuum technology.

Au sommaire

Vacuum Technology
Gas Properties
Gas Flow
Gas Release from Solids
Pressure Gauges
Flow Meters
Pumping Speed
Residual Gas Analyzers
Interpretation of RGA Data
Mechanical Pumps
Turbomolecular Pumps
Diffusion Pumps
Pump Fluids
Getter and Ion Pumps
Cryogenic Pumps
Materials in Vacuum
Joints, Seals, and Valves
Lubrication
Rough Vacuum Pumping
High Vacuum Systems
Ultraclean Vacuum Systems
High Flow Systems
Multichamber Systems
Leak Detection

Symbols
Appendix A Units and Constants
Appendix B Gas Properties
Appendix C Material Properties
Appendix D Isotopic Abundances
Appendix E Cracking Patterns
Appendix F Pump Fluid Properties
Index

L'auteur - John F. O'Hanlon

PhD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

Caractéristiques techniques

	PAPIER
Éditeur(s)	Wiley
Auteur(s)	John F. O'Hanlon
Parution	31/07/2003
Édition	3^eme édition
Nb. de pages	516
Format	16 x 24
Couverture	Relié
Poids	870g
Intérieur	Noir et Blanc
EAN13	9780471270522
ISBN13	978-0-471-27052-2