An Introduction to Microelectromechanical Systems Engineering
290 pages, parution le 01/12/1999
Résumé
Here's the first non-technical introduction to the exciting
field of Microelectromechanical systems (MEMS). It
describes in detail the materials used in producing MEMS --
including silicon, polymers and glass and quartz substrates
-- as well as MEMS design for nozzles, sensors, valves and
other applications. It examines the manufacture of
commercial MEMS using techniques such as oxidation,
lithography, chemical vapor deposition and silicon fusion
bonding and applications in a wide range of industries
including data storage, telecommunications, consumer,
automotive, medical and defense.
A unique element of this book is its look at the future of
MEMS -- its potential for microelectrode arrays, actuators
and optical switches and other technologies. It is a
unique,. first-of-its-kind recourse that will appeal to
managers, consultants and engineers looking to understand
and exploit the commercial potential for MEMS as well as
university professors and graduate students.
Contents
- MEMS: A Technology from Lilliput
- The Sandbox: Materials for MEMS
- The Toolbox: Processes for Micromachining
- The Gearbox: Commercial MEM Structures and
Systems
- The New Gearbox: A Peek Into The Future
- The Box: Packaging For MEMS
L'auteur - Nadim Maluf
Nadim Maluf, is the consulting professor in EE at the Stanford Micromachined Transducers Laboratory and Lucas NovaSensor's representative on the CIS Advisory Committee. His research interests are in silicon micromachined transducers.
Caractéristiques techniques
| PAPIER | |
| Éditeur(s) | Artech House |
| Auteur(s) | Nadim Maluf |
| Parution | 01/12/1999 |
| Nb. de pages | 290 |
| Couverture | Relié |
| Intérieur | Noir et Blanc |
| EAN13 | 9780890065815 |
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