An Introduction to Microelectromechanical Systems Engineering

Nadim Maluf, Kirt Williams - Collection Microelectromechanical systems series

320 pages, parution le 12/08/2004 (2^eme édition)

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Résumé

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list.

With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company’s management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

L'auteur - Nadim Maluf

Nadim Maluf, is the consulting professor in EE at the Stanford Micromachined Transducers Laboratory and Lucas NovaSensor's representative on the CIS Advisory Committee. His research interests are in silicon micromachined transducers.

L'auteur - Kirt Williams

Kirt Williams is a senior scientist at Science Applications International Corporations. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley. He is the author of numerous papers on MEM devices and fabrication processes.

Sommaire

MEMS: A Technology from Lilliput
The Sandbox: Materials for MEMS
The Toolbox: Processes for Micromachining
MEM Structure and Systems in Industrial and Automotive Applications
MEM Structures and Systems for Photonic Applications
MEM Structures and Systems for Medical Applications.
MEM Structures and Systems for Electronic and RF Applications.
Packaging & Reliability for MEMS

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Caractéristiques techniques

	PAPIER
Éditeur(s)	Artech House
Auteur(s)	Nadim Maluf, Kirt Williams
Collection	Microelectromechanical systems series
Parution	12/08/2004
Édition	2^eme édition
Nb. de pages	320
Format	18,5 x 26
Couverture	Relié
Poids	685g
Intérieur	Noir et Blanc
EAN13	9781580535908
ISBN13	978-1-58053-590-8