Micro and Nanomanufacturing

Mark J. Jackson

712 pages, parution le 05/01/2007

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Résumé

Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.

Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials.

Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn about:

Manufacturing and fabrication techniques at the micro and nanoscales
Using bulk and surface micromachining techniques, LiGA, and deep x-ray lithography to manufacture semiconductors
Producing master molds with micromachining
The deposition of thin films, pulsed water drop machining, and nanomachining

Written for:
Engineers who want a thorough knowledge of how Nano and Micro devices are designed and fabricated and the myriad number of factors that must be considered when designing and fabricating these devices

Sommaire

Principles of Micro- and Nanofabrication
Microfabriaction Using X-Ray Lithography
Manufacturing High Aspect Ration Microstructures
Meso-Micromachining
Mechanical Micromachining
Microgrinding
Diamond Micro Cutting Tools
Laser Micro- and Nanofabrication
Micromachining Using Water Droplets
Diamond Nanogrinding
Nanomachining
Micro-and Nanomanufacturing

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Caractéristiques techniques

	PAPIER
Éditeur(s)	Springer
Auteur(s)	Mark J. Jackson
Parution	05/01/2007
Nb. de pages	712
Format	16,5 x 24
Couverture	Relié
Poids	1085g
Intérieur	Noir et Blanc
EAN13	9780387258744
ISBN13	978-0-387-25874-4