Résumé
Table of Contents
- Part I: Background and Fundamentals
- Introduction, Mohamed Gad-el-Hak, University of Notre Dame
- Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation
- Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University
- Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame
- Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University
- Liquid Flow in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University
- Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University
- Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University
- Lubrication in MEMS, Kenneth S. Breuer, Brown University
- Physics of Thin Liquid Films, Alexander Oron, Technion, Israel
- Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame
- Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame
- Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego
- Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame
- Part II: Design and Fabrication
- Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University
- MEMS Fabrication, Marc J. Madou, Nanogen, Inc.
- LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc.
- X-Ray Based Fabrication, Todd Christenson, Sandia National Laboratories
- Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation
- Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center
- Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center
- Microfabricated Chemical Sensors for Harsh Environments, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc.
- Packaging of Harsh Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center
- Part III: Applications of MEMS
- Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc.
- Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison
- Sensors and Actuators for Turbulent Flows. Lennart Löfdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame
- Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories
- Microrobotics Thorbjörn Ebefors and Göran Stemme, Royal Institute of Technology, Sweden
- Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc.
- Micro-Droplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan
- Micro-Heat-Pipes and Micro-Heat-Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute
- Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology
- Flow Control, Mohamed Gad-el-Hak, University of Notre Dame)
- Part IV: The Future
- Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University
- Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University
- Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame
- Index
Caractéristiques techniques
PAPIER | |
Éditeur(s) | CRC Press (Taylor and Francis Group) |
Auteur(s) | Mohamed Gad-el-Hak |
Parution | 02/11/2001 |
Nb. de pages | 3626 |
Format | 18,3 x 26 |
Couverture | Relié |
Poids | 1153g |
Intérieur | Noir et Blanc |
EAN13 | 9780849300776 |
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