The mems handbook

Table of Contents

• Part I: Background and Fundamentals
• Introduction, Mohamed Gad-el-Hak, University of Notre Dame
• Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation
• Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University
• Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame
• Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University
• Liquid Flow in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University
• Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University
• Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University
• Lubrication in MEMS, Kenneth S. Breuer, Brown University
• Physics of Thin Liquid Films, Alexander Oron, Technion, Israel
• Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame
• Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame
• Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego
• Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame
• Part II: Design and Fabrication
• Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University
• MEMS Fabrication, Marc J. Madou, Nanogen, Inc.
• LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc.
• X-Ray Based Fabrication, Todd Christenson, Sandia National Laboratories
• Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation
• Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center
• Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center
• Microfabricated Chemical Sensors for Harsh Environments, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc.
• Packaging of Harsh Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center
• Part III: Applications of MEMS
• Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc.
• Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison
• Sensors and Actuators for Turbulent Flows. Lennart Löfdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame
• Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories
• Microrobotics Thorbjörn Ebefors and Göran Stemme, Royal Institute of Technology, Sweden
• Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc.
• Micro-Droplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan
• Micro-Heat-Pipes and Micro-Heat-Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute
• Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology
• Flow Control, Mohamed Gad-el-Hak, University of Notre Dame)
• Part IV: The Future
• Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University
• Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University
• Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame
• Index