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The mems handbook

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The mems handbook

The mems handbook

3626 pages, parution le 02/11/2001

Résumé

The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS.The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Table of Contents

  • Part I: Background and Fundamentals
  • Introduction, Mohamed Gad-el-Hak, University of Notre Dame
  • Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation
  • Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University
  • Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame
  • Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University
  • Liquid Flow in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University
  • Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University
  • Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University
  • Lubrication in MEMS, Kenneth S. Breuer, Brown University
  • Physics of Thin Liquid Films, Alexander Oron, Technion, Israel
  • Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame
  • Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame
  • Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego
  • Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame
  • Part II: Design and Fabrication
  • Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University
  • MEMS Fabrication, Marc J. Madou, Nanogen, Inc.
  • LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc.
  • X-Ray Based Fabrication, Todd Christenson, Sandia National Laboratories
  • Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation
  • Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center
  • Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center
  • Microfabricated Chemical Sensors for Harsh Environments, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc.
  • Packaging of Harsh Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center
  • Part III: Applications of MEMS
  • Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc.
  • Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison
  • Sensors and Actuators for Turbulent Flows. Lennart Löfdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame
  • Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories
  • Microrobotics Thorbjörn Ebefors and Göran Stemme, Royal Institute of Technology, Sweden
  • Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc.
  • Micro-Droplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan
  • Micro-Heat-Pipes and Micro-Heat-Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute
  • Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology
  • Flow Control, Mohamed Gad-el-Hak, University of Notre Dame)
  • Part IV: The Future
  • Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University
  • Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University
  • Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame
  • Index

Caractéristiques techniques du livre "The mems handbook"

  PAPIER
Éditeur(s) CRC Press (Taylor and Francis Group)
Auteur(s) Mohamed Gad-el-Hak
Parution 02/11/2001
Nb. de pages 3626
Format 18,3 x 26
Couverture Relié
Poids 1153g
Intérieur Noir et Blanc
EAN13 9780849300776

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